Reduction of Electron Temperature in rf Plasma Using Magnetic Filter

Abstract

The radio frequency (rf) plasma was adopted to reduce electron temperature, using a magnetic filter. Detection of electron energy distribution functions with a grid analyzer facing the plasma source and the magnetic filter revealed that only the low energy electrons passed through the magnetic filter and the high energy electrons were reflected by the filter. A reduction of the rf oscillating potential was also observed after passing through the filter, using a novel method with an emissive probe. The reduction rate, expressed as a function of the ion hole parameter around the magnetic filter, was found to be described by a fixed curve for various ion species and neutral gas pressures.