Abstract
Freestanding BaTiO3 (BTO)/Pt films were fabricated and the orientation and crack density of BTO films were investigated as a function of substrate temperature, Tsub, during BTO deposition. When Tsub is low, the BTO film exhibits preferentially (101)-orientated structure. On the other hand, (001)-orientation becomes dominant when Tsub is high. This means that controlling of orientation by changing the Tsub is possible. In addition, the density of cracks of the BTO film on the Pt foil was lower than on the Pt/Ti/SiO2/Si substrate, as a result of the removal of clamping effect of the substrate.
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