Abstract

Electron backscatter diffraction (EBSD) is a technique that can provide identification of unknown crystalline phases while exploiting the excellent imaging capabilities of the scanning electron microscope (SEM). Phase identification using EBSD has now progressed to the point that it is commercially available. Phase identification in the SEM requires high quality EBSD patterns that can only be collected using either film or charge coupled device (CCD)-based cameras. High quality EBSD patterns obtained in this manner show many diffraction features that are useful in the determination of the unit cell of the sample.’ This paper will discuss the features in the EBSD patterns and the procedure used to determine the reduced unit cell of the sample.One of the major advantages of EBSD over electron diffraction in the transmission electron microscope is the remarkable field of view that is routinely attained. The large angular view of the diffraction pattern permits many zone axes and their associated symmetries to be viewed in a single pattern or at most a few patterns.

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