Abstract
Reduced Threading Dislocation Density in a Ge Epitaxial Film on a Submicron-Patterned Si Substrate Grown by Chemical Vapor Deposition
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https://doi.org/10.1007/s11664-023-10302-3
Journal: Journal of Electronic Materials | Publication Date: Mar 7, 2023 |
Citations: 5 |
Reduced Threading Dislocation Density in a Ge Epitaxial Film on a Submicron-Patterned Si Substrate Grown by Chemical Vapor Deposition
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