Abstract

We propose a simplified numerical technique to quantify the effects of non-linear stiffness in MEMS resonators and we validate our approach on a clamped–clamped beam, a softening Disk Ring Gyroscope (DRG) and a shallow arch showing internal resonance. We generate a Reduced Order Model (ROM) which is integrated with either a direct integration approach or a continuation technique with arc length control. Finally we compare and validate the results with a full FEM model.

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