Abstract
A Model Order Reduction (MOR) technique based on the Implicit Condensation (IC) method has been recently proposed as a powerful tool able to predict a priori, i.e. without the need of experimental calibration of parameters, and in real-time, i.e. by solving one or two degrees-of-freedom system of equations, the nonlinear behavior of resonant Micro-Electro-Mechanical Systems (MEMS). In this work, the MOR technique is employed to predict the complex nonlinear dynamic response of a MEMS arch resonator exhibiting 1:2 internal resonance. Experiments match very well numerical predictions, thus proving great potential of the proposed approach for the simulation of highly nonlinear MEMS devices.
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