Abstract
This paper deals with electrostatically actuated nanoelectromechanical (NEMS) cantilever resonators. The dynamic behavior is described by a second order partial differential equation. The NEMS cantilever resonator device is actuatedby an AC voltage resulting in a vibrating motion of the cantilever. At nano scale, squeeze film damping, Casimir force, and fringing effects significantly influence the dynamic behavior or the cantilever beam. The second order partial differential equation is solved using the Reduced Order Model (ROM) method. The resulting time dependent second order differential equations system is then transformed into a first order differential equations system. Numerical simulations were conducted using Matlab solver ode15s.
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