Recycling of SiC in Crystalline Silicon Cutting Fluid

Abstract

Both merits and demerits of existing recovery techniques of crystalline silicon scrap cutting fluid were analyzed and compared in this paper. In the thesis, a new separation process for separating and recovering SiC in crystalline silicon cutting fluid was presented. The performance index of recycled SiC powder is equal/familiar to the new one, and that can replace the use of new one completely.