Abstract
Cleaved MgO(100) single crystals were implanted with 30 keV He3 ions with doses varying from 1×1019 to 1×1020 m−2 and subsequently thermally annealed from 100 to 1100 °C. Transmission electron microscopy observations revealed the existence of sharply rectangular nanosize voids at a depth slightly shallower than the helium-implantation range. Monitoring of the defect depth profile and the retained amount of helium was performed by positron-beam analysis and neutron depth profiling, respectively.
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