Abstract
We consider the problem of scattering of a guided TE-mode in a planar optical waveguide with small random irregularities. The results of numerical solution of the direct and inverse problems of waveguide scattering for a statistical stationary nanometer surface roughness are presented. We show the possibility of retrieving information on the statistical properties of the surface roughness from scattered-radiation measurements in the far region (or in the equivalent Fourier plane). It is found that superresolution can be reached in a roughness correlation range of about λ/30-λ/20 for high signal-to-noise ratios by optimizing the optical-transfer function and efficient smoothing.
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