Abstract

In ultra-high vacuum systems, obtaining the composition of a mass spectrum is often a challenging task due to the highly overlapping nature of the individual profiles of the gas species that contribute to that spectrum, as well as the high differences in terms of degree of contribution (several orders of magnitude). This problem is even more complex when not only the presence but also a quantitative estimation of the contribution (partial pressure) of each species is required. This paper aims at estimating the relative contribution of each species in a target mass spectrum by combining a state-of-the-art machine learning method (multilabel classifier) to obtain a pool of candidate species based on a threshold applied to the probability scores given by the classifier with a genetic algorithm that aims at finding the partial pressure at which each one of the species contributes to the target mass spectrum. For this purpose, we use a dataset of synthetically generated samples. We explore different acceptance thresholds for the generation of initial populations, and we establish comparative metrics against the most novel method to date for automatically obtaining partial pressure contributions. Our results show a clear advantage in terms of the integral error metric (up to 112 times lower for simpler spectra) and computational times (up to 4 times lower for complex spectra) in favor of the proposed method, which is considered a substantial improvement for this task.

Highlights

  • Residual gas analysis aims at identifying which gas species are present in vacuum systems and serves the purpose of finding the level and nature of contamination in those systems

  • We notice that the error decreases with the reduction of the probability threshold, which indicates that the result improves when increasing the pool of candidate gases allowed for the reconstruction of the spectrum by genetic algorithms (GAs)

  • The reason for this is that the populations generated contain more diversity, which helps the GA get closer to the global extremum by recombining them; When comparing the integral error (IE) obtained by the GA to the iterative deconvolution, we found the greatest improvement for the case of considering 2 gases and lowering the threshold to 0.3, reducing the IE by up to 2 orders of magnitude

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Summary

Introduction

Residual gas analysis aims at identifying which gas species are present in vacuum systems and serves the purpose of finding the level and nature of contamination in those systems. The process of generating an ultra-high vacuum (UHV) may be affected by the presence of contaminants of different origins, such as aromatics, paint, oil, alcohols and cleaning agents. Such contaminants are deposited (mainly during the manufacturing process) on the inner surface of the vacuum chambers and hinder the pump-down process and, the generation of the required pressure. Most commercial RGAs used in UHV applications are mobile quadrupole mass spectrometers (QMS) [4] using an electron-impact ion source with a limited mass range of 1–100 amu, sometimes up to 200 amu. The mass resolution of these instruments is, in general, in the range of 0.5 amu full width half maximum (FWHM), and 0.2 amu (FWHM) at best

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