Abstract

Atomic absorption spectrometry (AAS) is used to probe the distribution of sputtered copper atoms in the body of a discharge cell specially constructed to reproduce the environment of a hollow-cathode lamp. The use of a reconstruction in the treatment of data obtained from absorption measurements is detailed and demonstrated. Sample data from sputtering cells filled with argon and neon are evaluated. The resulting backprojection data set enables a numerical density of atoms at the top of the cathode bore to be determined. To illustrate the effectiveness of the technique, this value is calculated for data taken from copper cathodes operating in sputtering cells filled with argon and neon. Comment is made upon the usefulness and accuracy of the method.

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