Reconstruction of Atomic Force Microscope Image Using Estimated Tip Shape from Impulse Response Technique

Abstract

Atomic force microscopy (AFM) is the useful tool for measuring the micro fabricated devices. Measuring sample surface with AFM, tip-induced distortions are serious problem for accurate measurement. In order to overcome this problem, many studies are reported to reconstruct surface image to original sample surface. We studied method of reconstruction technique of the AFM image by using estimated 3-D tip shape from the impulse response technique. To reconstruct the image of the sample surface, we used a morphological reconstruction process. We demonstrated how to obtain the 3-D tip from the using impulse response technique and then how to reconstruct the 3-D AFM image using estimated tip shape.