Abstract
AbstractThe paper by Markarov [Surface and Interface Analysis, 20, 1993, pp. 821–826] considered the important problem of deconvolution of depth profiling data. In this note, we consider the problem of convoluting the initial Gaussian profile with a double exponential resolution function. The paper by Markarov only provided an asymptotic treatment of this problem. Here, we provide exact results, various approximations as well as a simple computer program. Copyright © 2007 John Wiley & Sons, Ltd.
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