Abstract
In an attempt to push the performance limits of piezoelectric MEMS microphones, several variations of micromachined acoustic sensors that contain piezoelectric zinc oxide nanorods embedded in a flexible polymer matrix were designed, fabricated, and characterized. The polymer matrix offers high compliance, high aspect ratio, ultrathin diaphragms, and low residual stress, while the zinc oxide nanorods provide high piezoelectric coupling. The devices, fabricated on a silicon substrate, consist of 100–800 μm diameter circular diaphragms composed of the piezoelectric polymer composite sandwiched between a circular gold bottom electrode and an annular gold top electrode. Electrical, mechanical, and acoustic characterization were performed on the fabricated sensors. Acoustic measurements included frequency response, sensitivity, linearity, and noise floor. Electrical properties such as resistance and capacitance, and piezoelectric properties, such as the effective piezoelectric coefficient, were also measured.
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