Recent progress in quantification of surface analysis techniques

Abstract

A short review is presented of recent developments and remaining problems in the quantification of the four techniques in common use for surface analysis (Auger-electron spectroscopy, X-ray photoelectron spectroscopy or ESCA, secondary-ion mass spectroscopy, and ion-scattering spectroscopy). The particular topics discussed include: the homogeneity of the sample; the tradeoffs between spatial resolution, accuracy and precision, sensitivity, and beam damage to the sample; the analytical methods; the measurement of spectral intensities and corrections for interferences; the “response function” of the particular instrument; and the advantages and disadvantages of instrument computerization.