Abstract
A method for producing single-phase cadmium stannate thin films is reported. Polycrystalline films were prepared by RF sputtering onto water-cooled Corning glass substrates, followed by a high temperature anneal. Resistivities as low as 1.28 × 10 −4 ohm·cm have been achieved, lower than any previously published results, for this material. Even with sheet resistivities as low as 2.5 ohm sq −1, exceptionally high film transparency (∼85%) is maintained, with very low absorption in the visible spectrum.
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