Abstract
An overview is given of recent developments in quantitative surface analysis by x-ray photoelectron spectroscopy and Auger electron spectroscopy. The two major tasks of an analysis are the identification of the surface phases that are present and the determination of the concentrations of particular elements or compounds. Methods for accomplishing both tasks are described together with the pitfalls and problems that remain. Particular attention is given to the following topics: identification of surface phases and reference data for the calibration of instrumental energy scales; reference data on inelastic mean free paths and attenuation lengths; effects of specimen crystallinity; intensity measurements; measurement of the imaging properties of electron energy analyzers; and the intensity-energy response functions of different instruments.
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