Abstract
Extreme high vacuum (xhv) down to the 10−11 Pa range has become realistic in several independent groups. In parallel, efforts to investigate the achievement of xhv from many aspects have been cooperated as a national scientific project of Special Coordination Funds for Promotion of Science and Technology in Japan. In this paper, some developments in the recent few years in Japan are reviewed, including: (i) critical evaluation about outgassing rate measurement techniques; (ii) the conductance-modulation technique used to determine the pumping speed and outgassing rate in the uhv region; (ii) low outgassing vacuum wall materials and the origin of desorbed species; and (iv) investigation of wall materials for xhv systems.
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