Abstract
Abstract Nano-opto-electro-mechanical systems (NOEMS), considered as new platforms to study electronic and mechanical freedoms in the field of nanophotonics, have gained rapid progress in recent years. NOEMS offer exciting opportunities to manipulate information carriers using optical, electrical, and mechanical degrees of freedom, where the flow of light, dynamics of electrons, and mechanical vibration modes can be explored in both classical and quantum domains. By exploiting NOEMS concepts and technologies, high speed and low-power consumption switches, high-efficiency microwave-optical conversion devices, and multiple quantum information processing functions can be implemented through on-chip integration. This review will introduce the principles of NOEMS, summarize the recent developments, and important achievements, and give a prospect for the further applications and developments in this field.
Highlights
Photons, electrons, and phonons are several basic particles in the field of physics
During the several past decades, micro-/nano-technology has promoted the rapid development of the micro-electromechanical systems (MEMS) field, where the interaction between mechanical and electrical degrees of freedom is widely studied
With the continuous reduction of device size, the MEMS field is gradually developing into the nanoelectro-mechanical systems (NEMS) regime
Summary
Electrons (holes), and phonons are several basic (quasi) particles in the field of physics. During the several past decades, micro-/nano-technology has promoted the rapid development of the micro-electromechanical systems (MEMS) field, where the interaction between mechanical and electrical degrees of freedom is widely studied. By studying the interaction of optical, electrical, and mechanical degrees of freedom, various applications of nano-optoelectro-mechanical systems (NOEMS) are explored, such as the control of photons, charges, and phonons, information processing at classical or quantum levels. The tuning principle mainly includes: Thermo-optic effect [9], electro-optic [10, 11] effect, and common optomechanical interaction in recent years Each of these tuning mechanisms has advantages and disadvantages. It is known to all that the electric drive of moving parts in optical cavities or waveguides can be used to adjust the phase or frequency of the corresponding light field to generate an effective electro-optic interaction. More and more applications in particular for switching, routing and sensing in hybrid systems offer a promising future to engineer and enhance the development of the NOEMS in the quantum regime
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