Abstract
Selected highlights in the recent development of microplasma devices are reviewed with emphasis on large arrays of Si-based hybrid plasma/semiconductor pixels. Arrays of 40 000 (200 × 200) pixels, excited by sinusoidal ac waveforms at frequencies of 5–20 kHz, have now been realized. The fabrication of these arrays and their electrical and optical performance with rare gases and Ar/N2 mixtures are briefly described. Metal/dielectric/metal devices having a piezoelectric dielectric (BaTiO3), a cylindrical microcavity 50 µm in diameter, and a total thickness of ∼ 110 µm are also discussed. Finally, the introduction of multiwall carbon nanotubes into microdischarge devices as an auxiliary source of current is presented as being exemplary of the opportunities afforded by the integration of nanotechnology into microcavity plasma structures.
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