Abstract
ABSTRACTThe continuously increasing commercial use of SF6 in the power industry, semiconductor manufacturing industry, and other related industries has led to a great increase in global total SF6 emission amount and the SF6 concentration in the atmosphere. The SF6 abatement strategies had received special attention due to the fact that SF6 has very high global warming potentials and long atmospheric lifetime. This paper reviews and summarizes the research findings on the various approaches and methods that are currently being used or under investigation. Particular interest is given to the development of nonthermal plasma techniques for the removal of SF6.
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