Real-time measurement of the adhesion force by Hybrid System of ESEM and AFM Cantilever

Abstract

A hybrid laser sensor and nanorobotic manipulation system was developed inside an environment scanning electron microscope (ESEM). A micro putter was fabricated from an atomic force microscope (AFM) cantilever through focused ion beam (FIB) etching technique. The laser head and the micro putter were assembled and fixed to the nano manipulator inside ESEM chamber. The displacement between the micro putter and the laser head can be measured by the laser sensor system. The relationship of the deflection of the micro putter and the applied force was calibrated by nanorobotic manipulation approach. The single cell's adhesion force to substrate surface was measured based on this hybrid system. The result indicates that both the dynamic data and precise observation can be achieved owing to the combination of the advantages of AFM and ESEM nano robotic manipulation system.