Abstract
A method for measurement range extension without deteriorating the accuracy is proposed on real-time laser displacement measurement based on intensity correlation with phase-modulated signal that we have been investigating for years. The proposed method uses the phase sign of the fundamental and second harmonic frequency components of the detected signal, where these components are expressed by sinusoidal and cosinusoidal functions. In principle, any displacement is measured from the combination of the amplitudes and phase signs of the detected signal components. We performed proof-of-concept experiments of displacement measurement by using a precision motorized stage and successfully confirmed the principle.
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