Abstract
Real-time phase-shifting interferometry based on pixelated micropolarizer array (PMA) has recently been used to achieve real-time phase measurement, and the requirement of vibration resistance is greatly reduced. In this paper, a 320×240 Aluminum PMA with 7.4 μm pitch is successfully fabricated by the electron beam lithography (EBL). The period of the grating is 140nm, and the polarization directions of each 2×2 units are 0°, 45°, 90°, and 135°. The PMA is integrated to the CCD sensor to achieve real-time phase measurement. Four fringe patterns of different polarization directions are obtained from only one single frame image by linear interpolation method, and then the object wave phase is calculated in real-time. Moreover, dynamic phase caused by temperature change is obtained in real-time, which verify the feasibility of this method in real-time dynamic phase measurement.
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