Abstract
To clarify the potential as atomic force microscope (AFM) memory media, nanometer-scale mechanical processing properties of polycarbonate and fluorocarbon plasma-treated polycarbonate were determined by tip sliding of AFM. The surface energy of polycarbonate can be reduced by fluorocarbon plasma treatment. Furthermore, plasma treatment of polycarbonate can reduce the processing force. Nanometer-scale precise processing of polycarbonate can be realized by fluorocarbon plasma treatment. For the formation of lines, spaces and nano meter-scale fine dots, the interval pitch as minimized to 60nm using the fluorocarbon plasmatreated polycarbonate as processing media. High-density recording can be realized by nanometer-scale processing of fluorocarbon plasma-treated polycarbonate. Fluorocarbon plasma treatment can reduce the friction and improve the wear resistance of polycarbonate. Therefore, the friction durability corresponding to the reliability of data reproduction were markedly improved.
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