Realization of multi-paired photonic crystals by the multiple-exposure nanosphere lithography process

Abstract

Arrays of two-dimensional multi-paired photonic crystals (PCs) have been fabricated by a multiple-exposure nanosphere lithography (MENSL) method utilizing a self-assembled nanosphere as a lens mask and an expanded He–Cd laser. The nanospheres were self-assembled on a photoresist. The masked PR was then multi-exposed with changing rotation angle (θ) and tilt angle (γ). Scanning electron microscopy reveals that MENSL is a useful tool for fabricating multi-paired PCs with various lattice structures.