Abstract
Two resonators with polysilicon microbeams as oscillating elements are presented. One oscillator is capacitively excitated and detected, the other one is electro-thermally activated and measured by means of piezoresistors. Sacrificial layer technology with different types of sacrificial dioxide (thermal and CVD) is applied for the fabrication of the free-standing polysilicon beams. Gain/phase measurements are performed to examine the frequency response of the resonators.
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