Abstract
Large area graphene-poly (methyl methacrylate) (PMMA) closed cavity resonator has been fabricated. The resonator has been formed by transferring an ultra-large graphene-PMMA membrane over 3.5 mm diameter circular closed cavity with $220~\mu \text{m}$ depth. The graphene-PMMA membrane includes 6-layer graphene and 450 nm PMMA film. A modified graphene-PMMA dry transfer method has been developed in this work. Using the Kapton tape supporting frame, the graphene-PMMA membrane has been dry transferred onto the substrate with a small membrane’s static deformation of around 180 nm. The membrane’s static deformation aspect ratio (suspended membrane’s diameter over the membrane’s deformation) is around 19,500. The graphene-PMMA closed cavity resonator has been actuated mechanically, acoustically and electro-thermally. The dynamic behaviour of the membrane suspended over the closed cavity shows that the (1, 1) mode dominates the graphene-PMMA membrane’s resonance with a resonant frequency of around 10 kHz and suggests the device is under good gas encapsulation. Acoustic vibration amplitude sensitivity of graphene-PMMA membrane over the closed cavity is measured to be around $6~\mu \text{m}$ /Pa. The membrane’s dynamic behaviour, simulated under similar mechanical and electro-thermal actuation conditions, has been shown to be consistent with the trend of the device’s experimental results. The strain in the suspended graphene-PMMA membrane is estimated to be 0.04 ± 0.01 %.
Highlights
M ECHANICAL graphene resonators in the micro- and nano- scale have been reported to possess outstanding properties, including ultralow mass, high quality factorManuscript received December 18, 2019; accepted December 28, 2019
Raman spectrum confirms that the ultra large graphene membrane has been transferred safely using the modified graphene dry transfer method
The WLI results indicate that the dry transfer method can be used to transfer graphenePMMA membrane over the large area closed cavity with small static deformation
Summary
M ECHANICAL graphene resonators in the micro- and nano- scale have been reported to possess outstanding properties, including ultralow mass, high quality factorManuscript received December 18, 2019; accepted December 28, 2019. M ECHANICAL graphene resonators in the micro- and nano- scale have been reported to possess outstanding properties, including ultralow mass, high quality factor. Date of publication January 13, 2020; date of current version April 3, 2020. The associate editor coordinating the review of this article and approving it for publication was Dr Carlos Marques. Some graphene-based acoustic sensors with good performance, including microphones, open cavity resonators and loudspeakers, have been fabricated successfully in the past [9]–[15]. Such devices have graphenebased membrane aspect ratios, defined as the diameter to thickness ratio for the membrane, between 3400 and 350,000
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
