Abstract
There is considerable interest in thin-film microheaters for decreasing the power consumption in portable applications. In this paper, we present the study of new stacked thin membranes (SiO 2/SiN 1.2) supporting the heating element (polysilicon resistor). The great interest of using SiN 1.2 deposited onto a SiO 2 layer is the improvement in mechanical properties of the membrane, leading to a fabrication yield very close to 100%. Microheaters fabricated with a 1.6 mm × 1.6 mm square and 0.7 μm thick SiO 2/SiN 1.2 membrane give promising results in terms of power consumption; 230°C is reached with an electrical power of 50 mW.
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