Abstract
This paper presents the realization of the Isara 400 ultra-precision 3D coordinate measuring machine, which features a measuring volume of 400 × 400 × 100 mm and a volumetric (3D) measurement uncertainty of 100 nm (2σ). In order to achieve these challenging specifications, specific calibration strategies need to be applied, such as the calibration of flatness and out-of-squareness of the system's mirror table. In addition, a newly developed ultra-precision tactile probe system is described, featuring a probe tip with a diameter of 70 μm; results of the 3D sensitivity calibration of this probe are presented.
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