Abstract
As the new generation of 3D imaging Lidar is being more and more miniaturized, low-cost and high-precision, micro-electromechanical systems(MEMS) are being considered as core components due to their unique characteristics. In practice, according to the distance of the measured objects, it is necessary to change the field-of-view scanning in real-time to achieve the best imaging effect. In this paper, we attempt to establish a nonlinear dynamic model of the MEMS scanning micromirror, and thereby determine the nonlinear relationship between the driving voltage and the scanning angle. The field-of-view scanning in the range of 0–40° can be achieved by controlling the drive voltage of the MEMS scanning micromirror.
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