Abstract
In this paper, a Kalman filtering method incorporating an indentation model is proposed for noise and indentation problems during dynamic thickness measurement of suspended fiber Bragg gratings sensors. This method not only plays a filtering estimation effect, but also can effectively compensate the indentation error in the contact thickness measurement process. The relevant experimental results show that the method can obtain better compensation values for parts under measurement of various materials and thicknesses, the compensated thickness is in good agreement with the true value, and the average absolute percentage error is not more than 5%. The method is also highly applicable to dynamic measurement processes with high noise levels. Finally, the designed filtering compensation method is applied to an example of scanning sample morphology and achieves excellent results.
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