Abstract

This study addresses a new problem on scheduling of nonidentical multiple diffusion furnaces (NMDF) with machine eligibility restriction (MER) along with important real-life problem characteristics such as multiple and incompatible job-families, different release time, different due-date, non-agreeable release time & due-date, and occurrences of randomly and dynamically generated real time events (jobs and/or resources related) to minimize total weighted tardiness. Due to the computational difficulty in obtaining an optimal solution for large real-life sized scheduling of NMDF, an alternate solution procedure: heuristic algorithm based on due-date based dispatching rule, called due-date based heuristic algorithm (DDHA) is constructed in this study. Though there has been extensive scheduling research relating to the use of existing dispatching rules in semiconductor manufacturing along with/without new dispatching rules, there is no comparative analysis of all due-date based dispatching rules for real time scheduling (RTS) of NMDF-MER. Hence, this study proposes 20 variants of DDHA, considering various due-date based dispatching rules, for RTS-NMDF-MER and compares their performance. A suitable experimental design is developed and randomly generated 270 instances to represent the research problem considered in this study. From the empirical and statistical analysis carried out in this study, the better performing DDHA(s), for RTS-NMDF-MER, are identified.

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