Real-time online monitoring of nanosecond pulsed laser scribing process utilizing spectrometer

Abstract

This study proposes a novel configuration and algorithm to develop real-time online monitoring of an ultrafast scribing process utilizing a spectrometer. The target process was the ultrafast low energy scribing process performed by using a nanosecond laser. A new configuration in which the spectrometer probe incorporated into the scanner head unit and received the reflection light of microprocessing via a special monitoring adapter has been developed. The scan head adapter enables the scan head-based observation of a galvanometer and polygon scan head's working field. Typical applications include process monitoring or determination of a work piece's orientation during laser processing.