Abstract

In this paper, we present a real-time measurement technology for the free spectral range (FSR) of an ultrahigh-aspect-ratio silicon nitride (Si3N4) waveguide ring resonator (WRR). Two different correlated resonant modes were tracked by two optical single-sideband frequency-shifted lights to eliminate interference noise in the Pound-Drever-Hall error signals. A relative precision of 0.1474 ppm was achieved for a 35 mm WRR with FSR = 1,844,944.5 kHz and finesse (F) = 13.2. Furthermore, a cross-correlation of 0.913 between FSR-calculated and thermistor-measured temperatures indicated a high correlation between the real-time FSR and room temperature. We believe this technology is currently the best way to realize low-finesse (F < 50) real-time FSR measurements in the GHz range.

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