Abstract
This letter reports the design and fabrication of wirelessly controlled mobile microrobots with an on-board vision-based two-dimensional microforce sensor for use in force-guided micromanipulation tasks. The microforce sensing mobile microrobots ( $\mu$ FSMM) presented here exhibit compliant end-effectors with different stiffnesses and color tracking fiducials, which are used in conjunction with computer vision algorithms to provide real-time microforce feedback to the user when performing teloperated micromanipulation tasks. The stiffness of the compliant springs has been tailored to provide an in situ micronewton level force detection capability with sub- $\mu$ N resolution for the first time to mobile microrobots. The $\mu$ FSMMs can be used in the fields of mechanobiology, theranostics, and for force-guided micromanipulation tasks with delicate structures, such as biological cells.
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