Abstract
Broad flat field laser scanning is critical to the success of laser material processing, used in techniques such as rapid prototyping & manufacturing (RP&M) and micro-machining. For these techniques it is necessary to produce high-performance optical systems that can fulfill the need for a smaller focused spot size over broad, flat field scanning areas. This paper concentrates on the issues of defocus error compensation. A dynamic focusing system is designed, intended primarily for broad flat field galvanometric laser scanning applications. Key technologies are described in detail; corresponding solutions have been used to design and produce a CO 2 infrared optical focusing system, which is capable of scanning a focused spot size of 120 μm or less over areas up to 500 mm 2.
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