Abstract
This study used the micro-electro-mechanical systems (MEMS) technology to develop a high-pressure resistant flexible 7-in-1 microsensor (voltage, current, humidity, temperature, pressure, flow, and hydrogen). The microsensor is integrated with a flexible printed circuit (FPC) for real-time data acquisition of local voltage, current, humidity, temperature, pressure, flow, and hydrogen variations in different positions inside a high-pressure proton exchange membrane water electrolyzer (PEMWE). The goal of developing such microsensor is to observe the influence of temperature and pressure on the PEMWE. The operational safety of hydrogen is ensured by using a micro hydrogen sensor.
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