Abstract
A variable reference leak rate system is developed for real time calibration of ultrasensitive leak detection. It is based on the molecular flow characteristics of the platinum wire-glass leak element combined with a helium pressure adjustable device. Helium reference leak rate range from 10 −14 to 10 −10 Pa m 3/s is provided and has been used for real time calibration of ultrasensitive mass spectrometer leak detection system.
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