Abstract
In this article, an automatic detection and judgement method for macro defects in thin film transistor (TFT) fabrication process is proposed using a high-resolution line charge-coupled device camera as a preliminary inspection method for TFT liquid crystal display (TFT-LCD) panel. Macro defects are classified primarily into four types. Relevant detection and judgement methods are then applied according to the type of macro defect using different criteria such as diffraction pattern shifts, just noticeable differences, and the gradient of inspection images. The proposed method is verified with industrial experiments. In the experiment, 559 TFT glasses are used, which are sampled among the glasses and were judged as PASS (i.e. non-killer-defected glass) in the TFT fabrication process by a conventional human inspection method, but were judged as REJECT (i.e. killer-defected glass) in the module process. All macro defects in the sampled glasses were detected and rejected in the TFT fabrication process using the proposed method.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.