Abstract

This paper presents a small-sized, low-power gas sensor system combining a high-electron-mobility transistor (HEMT) device and readout integrated circuit (ROIC). Using a semiconductor-based HEMT as a gas-sensing device, it is possible to secure high sensitivity, reduced complexity, low power, and small size of the ROIC sensor system. Unlike existing gas sensors comprising only HEMT elements, the proposed sensor system has both an ROIC and a digital controller and can control sensor operation through a simple calibration process with digital signal processing while maintaining constant performance despite variations. The ROIC mainly consists of a transimpedance amplifier (TIA), a negative-voltage generator, and an analog-to-digital converter (ADC) and is designed to match a minimum target detection unit of 1 ppm for hydrogen. The prototype ROIC for the HEMT presented herein was implemented in a 0.18 µm complementary metal–oxide–semiconductor (CMOS) process. The total measured power consumption and detection unit of the proposed ROIC for hydrogen gas were 3.1 mW and 2.6 ppm, respectively.

Highlights

  • Low-Power Gas Sensor Based on Recently, owing to rapid developments in industry and technology, interest in mitigating the severity of air pollution and air quality is increasing

  • We propose a low-power, ultrasmall, and high-sensitivity gas sensor by combining high-electronmobility transistor (HEMT) devices with a novel readout integrated circuit (ROIC)

  • Since the Vth of the HEMT device is affected by process voltage temperature (PVT) variations and has a negative value, a block capable of supplying a wide range of negative voltages is required for optimal gate biasing for high sensitivity

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Summary

Introduction

Low-Power Gas Sensor Based on Recently, owing to rapid developments in industry and technology, interest in mitigating the severity of air pollution and air quality is increasing. An electrochemical sensor containing a chemical, which detects the current generated by the redox reaction caused by a certain gas, has the advantage of high accuracy and linearity, and it has been continuously developed until recently [1]. HEMT devices have several advantages for use as gas sensors They have high electrical conductivity owing to device characteristics. They respond quickly and sensitively to gas detection. HEMTs have a fatal disadvantage in that they are vulnerable to process voltage temperature (PVT) variations This causes deviations in sensor performance and lowers accuracy, making commercialization difficult. We propose a low-power, ultrasmall, and high-sensitivity gas sensor by combining HEMT devices with a novel ROIC

High-Electron-Mobility Transistor Device
Proposed Readout Integrated Circuit and Calibration
Negative Voltage Generator
Transimpedance Amplifier with Nested Chopper
Third-Order Delta-Sigma ADC
Measurements
Conclusions
Full Text
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