Abstract
Bulk Acoustic Wave (BAW) resonators based on piezoelectric semiconductors are radio frequency devices that can convert X-ray dose rate into resonant frequency offset, which exhibit strong anti-interference capabilities and low power consumption and are suitable for wireless sensing systems. In this study, we designed a readout circuit for a ZnO BAW X-ray dose rate detector. (0001)-oriented ZnO single crystals were used to fabricate the high-quality BAW X-ray detector. Under dark field and X-ray irradiation conditions, the resonant frequency offset of the detector was recorded via the readout circuit. The readout circuit consists of an oscillator circuit based on a Pierce oscillator circuit structure, a frequency mixing circuit, and an STM32 microcontroller. This design offers higher frequency stability and lower phase noise. In practical applications, it can replace the expensive and bulky vector network analyzer for detecting and storing the resonant frequency of BAW resonators with the advantages of fast readout speed and portability.
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