Reactor length-scale modeling of chemical vapor deposition of carbon nanotubes

Abstract

Chemical Vapor Deposition (CVD) of carbon nanotubes from a gas mixture consisting of methane (carbon precursor) and hydrogen (a carrier gas) in the presence of cobalt, nickel or iron catalytic particles in a cylindrical reactor is modeled at the reactor length-scale by solving a continuum-based coupled boundary-layer laminar-flow hydrodynamics, heat-transfer, gas-phase chemistry and surface chemistry problem. The model allows determination of the gas-phase fields for temperature, velocity, and various species as well as the surface-species coverages and the carbon deposition rate. Various available experimental and theoretical assessments are used to construct the necessary database for gas-phase and surface chemistry and gas-phase transport parameters. A reasonably good agreement is found between the model predicted and the experimentally measured carbon nanotubes deposition rates over a relatively large range of processing conditions.