Abstract
Doping of hafnium nitride (HfN) coatings increases the hardness by as much as 50% over that of undoped coatings. Pure hafnium nitride coatings prepared via-high-rate reactive sputtering are already considerably harder than bulk HfN material. The Vickers microhardness (100 gf) of reactively-sputtered HfN has an optical hardness of 3280 kgf mm -2 compared with 1600 kgf mm -2 for the bulk material. Powder metal Research S-Gun targets were prepared with 1 at.% of phosphorus, arsenic, antimony and bismuth in them. These doped targets were reactively sputtered in a nitrogen atmosphere onto M-2 high speed steel, and the hardness, crystallographic structure and chemical composition of these doped HfN coatings were measured. In all cases, the crystal structure remained basically f.c.c. with a lattice parameter of 4.56 Å. Electron beam microprobe analysis was not able to detect any of the dopants in the coatings, but the hardness measurements did show a difference that was dependent on the particular dopant. The measured Vickers (100 gf) optical microhardnesses for HfN:P, HfN:As, HfN:Sb and HfN:Bi were 3570 kgf mm -2, 3850 kgf mm -2, 4920 kgf mm -2 and 4370 kgf mm -2 respectively.
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