Abstract

Hall effect and conductivity results are presented on Si crystals containing from 5 × 10 17 to 1.6 × 10 18 cm −3 of oxygen and various dopings of B, Al and Ga before and after reaction at various temperatures (410–1350°C). Evidence in support of the tetrahedral SiO 4 model for the donor formed from oxygen suggested by Kaiser is presented. A large hole-electron effect is noted in the presence of excess acceptor concentration. In addition, specific interactions with the acceptor atoms occur. Although the reactions are complex and are not understood, three kinds are postulated in order to account for the results : (1) The formation of isolated SiO 4 donors such as occurs in undoped Si crystals containing oxygen. (2) The reaction of oxygen at an acceptor atom to form a neutral compound or a “molecular pair”. (3) The formation of a donor involving eight oxygen atoms and an acceptor atom. The latter reaction is believed to occur most readily in the case of Al-doped crystals and, in an excess of oxygen, leads to the formation of one donor per Al atom.

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