Reactions at solid state surfaces and thin films by means of in situ electron microscopy

Abstract

A survey is presented of modern in situ electron microscopic techniques; the possibilities for studying solid state interactions are discussed. These comprise reactions at solid state surfaces and at thin films, caused by in situ SEM and TEM techniques. The information content of the electron microscopic investigations can be enlarged by these techniques, as it will be shown for different applications. Trends towards a “microlab” inside the microscope with complementary in situ techniques are also discussed.