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Abstract
ABSTRACTSecond generation barium MOCVD precursors have been investigated for the growth of high quality superconducting and ferroelectric thin films. Novel barium β-diketonate polyether adducts have been synthesized and characterized by X-ray crystallography, 1H and 13c nmr spectroscopies, elemental analysis, melting and sublimation points. Metalorganic chemical vapor deposition experiments have been performed using this new class of barium β-diketonate polyether adducts. The as-deposited barium films were characterized by scanning electron microscopy and energy dispersive x-ray spectroscopy. These results were correlated with reaction intermediates observed by FT-IR in temperature programmed oxidation of barium bis(2,2,6,6-tetramethyl-3,5-heptanedionate) on magnesium oxide. Conditions under which the barium source reagents proceed to BaO, BaCo3 or BaF2 were elucidated.
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