Abstract
In situ techniques have been employed to characterize laser plasma (plume) formation and reactions in the gas cloud formed from Al and NH 3. Optical emission imaging and spectroscopy, and time of flight mass spectrometry have been used to monitor ablation plume components. AlN films have been synthesized by reaction of laser evaporated Al in a NH 3 atmosphere. Optical multichannel emission spectroscopy (OMA) and intensified charge coupled device (ICCD) imaging have been applied to identification of the deposition precursors occurring in the plasma.
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