Abstract

In this report a qualitative analysis of nickel diffusion and precipitation processes in silicon, amorphized with nickel ions is performed in the temperature range which is common for various simultaneous silicon crystallization processes (solid phase epitaxial regrowth, silicide-mediated crystallization, random nucleation). Nonsteady nickel redistribution in silicon was found to be related with suicide-mediated crystallization processes. In its turn the assumed process of fast polycrystalline grains growth halts silicon solid phase epitaxial regrowth in such structures.

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